Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/06/2004
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Application #:
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10141025
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Filing Dt:
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05/07/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Ananda H. Kumar, Tetsuya Ishikawa, Kwok Manus Wong, Farahmand E. Askarinam
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Title:
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METHOD AND APPARATUS FOR HEATING A SEMICONDUCTOR WAFER PLASMA REACTOR VACUUM CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| M/S 2061 |
| 3050 BOWERS AVE. |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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