Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/20/2004
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Application #:
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10303321
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Filing Dt:
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11/21/2002
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Inventors:
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Patrick C. Joyce, Adrianne Tipton, Krishnan Shrinivasan, Dennis W. Hess et al
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Title:
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SUPERCRITICAL SOLUTIONS FOR CLEANING PHOTORESIST AND POST-ETCH RESIDUE FROM LOW-K MATERIALS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| BEYER WEAVER & THOMAS, LLP |
| JEFFREY K. WEAVER |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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