Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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10116327
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Filing Dt:
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04/04/2002
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Publication #:
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Pub Dt:
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11/07/2002
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Inventor:
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Shunji Hakomori
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Title:
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APPARATUS FOR POLISHING PERIPHERY OF DEVICE WAFER AND POLISHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 26478 HAYAKAWA, AYASE-SHI |
| KANAGAWA 252-1123, JAPAN |
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| SNELL & WILMER LLP |
| MICHAEL K. KELLY |
| ONE ARIZONA CENTER |
| 400 E. VAN BUREN STREET |
| PHOENIX, ARIZONA 85004-2202 |
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