Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10232635
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Filing Dt:
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08/30/2002
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Publication #:
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Pub Dt:
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03/04/2004
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Inventors:
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Anthony Chen, Gladys So-Wan Lo
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Title:
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H2O VAPOR AS A PROCESSING GAS FOR CRUST, RESIST, AND RESIDUE REMOVAL FOR POST ION IMPLANT RESIST STRIP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE & PENILLA, LLP |
| ALBERT S. PENILLA ESQ. |
| 710 LAKEWAY DRIVE |
| SUITE 170 |
| SUNNYVALE, CA 94085 |
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