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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
08/24/2004
Application #:
10066108
Filing Dt:
02/01/2002
Publication #:
Pub Dt:
01/09/2003
Inventors:
Sasa Bajt, James A. Folta, Eberhard A. Spiller
Title:
OPTIMIZED CAPPING LAYERS FOR EUV MULTILAYERS
Assignment: 1
Reel/Frame:
012580/0413Recorded: 02/01/2002Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/24/2002
Exec Dt:
01/24/2002
Exec Dt:
01/24/2002
Assignee:
1111 FRANKLIN STREET
OAKLAND, CALIFORNIA 94607
Correspondent:
LAWRENCE LIVERMORE NAT. LABORATORY
ALAN H. THOMPSON
PATENT GOUP, L-703
BOX 808, L-703
LIVERMORE, CA 94551
Assignment: 2
Reel/Frame:
014020/0919Recorded: 10/01/2003Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
09/26/2003
Assignee:
3065 BOWERS AVE.
C/O INTEL CORPORATION SCI-2-B1
SANTA CLARA, CALIFORNIA 95052-8119
Correspondent:
LAWRENCE LIVERMORE NAT. LABORATORY
ALAN H. THOMPSON
BOX 808, L-703
LIVERMORE, CA 94551

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