Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
Total Assignments:
1
|
Patent #:
|
|
Issue Dt:
|
09/21/2004
|
Application #:
|
09972765
|
Filing Dt:
|
10/05/2001
|
Publication #:
|
|
Pub Dt:
|
02/26/2004
| | | | |
Inventors:
|
SiYi Li, S.M. Reza Sadjadi, David R. Pirkle, Stephan Lassig, Sean Kang, Vinay Pohray et al
|
Title:
|
TRENCH ETCH PROCESS FOR LOW-K DIELECTRICS
|
|
Assignment:
1
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
|
|
|
LAM RESEARCH CORPORATION |
MICHAEL S. BRANDT |
4650 CUSHING PARKWAY, CA-1 |
FREMONT, CALIFORNIA 94538 |
|
|
Search Results as of:
05/14/2024 12:49 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|