Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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10118064
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Filing Dt:
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04/09/2002
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Publication #:
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Pub Dt:
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12/05/2002
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Inventors:
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Mitsukuni Tsukihara, Mitsuaki Kabasawa, Michiro Sugitani, Hiroshi Matsushita et al
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Title:
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ION IMPLANTATION APPARATUS CAPABLE OF INCREASING BEAM CURRENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-15, YATO-CHO 2-CHOME, NISHITOKYO-SHI |
| TOKYO, JAPAN |
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| ARENT FOX KINTNER, ET AL. |
| GEORGE E. ORAM, JR. |
| 1050 CONNECTICUT AVENUE, N.W. |
| SUITE 400 |
| WASHINGTON, D.C. 20036-5339 |
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