Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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09811419
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Filing Dt:
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03/20/2001
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Publication #:
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Pub Dt:
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12/20/2001
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Inventors:
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Masaya Ogura, Eiichi Murakami, Nobuaki Ogushi
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Title:
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EXPOSURE APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND PLANT THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER ET AL. |
| STEVEN E. WARNER |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NEW YORK 10112-3801 |
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