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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/21/2004
Application #:
10712040
Filing Dt:
11/14/2003
Publication #:
Pub Dt:
07/29/2004
Inventors:
Jun Emoto, Takeshi Kagaya, Kazuo Yamazaki
Title:
WAFER PROCESSING APPARATUS HAVING WAFER MAPPING FUNCTION
Assignment: 1
Reel/Frame:
015189/0398Recorded: 04/08/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/09/2004
Exec Dt:
01/09/2004
Exec Dt:
01/09/2004
Assignee:
1-13-1, NIHONBASHI, CHUO-KU
TOKYO, JAPAN 103-8272
Correspondent:
OBLON, SPIVAK, MCCLELLAND, ET AL.
ECKHARD H. KUESTERS
1940 DUKE STREET
ALEXANDRIA, VA 22314

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