Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10016441
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Filing Dt:
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12/11/2001
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Inventors:
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Todd P. Lukanc, Christopher A. Spence
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Title:
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METHOD OF ENHANCING CLEAR FIELD PHASE SHIFT MASKS WITH BORDER AROUND EDGES OF PHASE REGIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1160 KERN AVENUE |
SUNNYVALE, CALIFORNIA 94088 |
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FOLEY & LARDNER |
PAUL S. HUNTER |
FIRSTAR CENTER |
777 E. WISCONSIN AVE. |
MILWAUKEE, WI 53202-5367 |
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