Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10299434
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Filing Dt:
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11/19/2002
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Inventors:
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Mark Chang, Douglas Bonser, Marina V. Plant, Chih Yuh Yang, Scott A. Bell et al
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Title:
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METHOD FOR DEFECT REDUCTION AND ENHANCED CONTROL OVER CRITICAL DIMENSIONS AND PROFILES IN SEMICONDUCTOR DEVICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1160 KERN AVENUE |
| SUNNYVALE, CALIFORNIA 94086-3453 |
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| FOLEY & LARDNER |
| DAVID A. BLUMENTHAL |
| 2029 CENTURY PARK EAST |
| SUITE 3500 |
| LOS ANGELES, CA 90067-3021 |
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