Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10159262
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Filing Dt:
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05/31/2002
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Publication #:
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Pub Dt:
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12/19/2002
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Inventors:
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Norbert Falk, Gunther Ruhl
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Title:
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PLASMA-ETCHING PROCESS FOR MOLYBDENUM SILICON NITRIDE LAYERS ON HALF-TONE PHASE MASKS BASED ON GAS MIXTURES CONTAINING MONOFLUOROMETHANE AND OXYGEN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FREISINGER STR. 34 |
| ISMANING, GERMANY 85737 |
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| ST. - MARTIN-STRASSE 53 |
| MUENCHEN, GERMANY 81669 |
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| LERNER AND GREENBERG |
| RALPH E. LOCHER |
| P.O. BOX 2480 |
| HOLLYWOOD, FL 33022 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| GUSTAV-HEINEMANN-RING 212 |
| MUNICH, GERMANY 81739 |
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| JONATHAN BOCKMAN |
| C/O MORRISON & FOERSTER LLP |
| 1650 TYSONS BOULEVARD SUITE 400 |
| MCLEAN, VA 22102 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AM CAMPEON 1-12 |
| NEUBIBERG, GERMANY 85579 |
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| CPA GLOBAL LIMITED |
| LIBERATION HOUSE |
| CASTLE STREET |
| ST HELIER, JE1 1BL JERSEY |
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