Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/12/2004
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Application #:
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09955126
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Filing Dt:
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09/19/2001
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Publication #:
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Pub Dt:
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03/27/2003
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Inventors:
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Keum Joo Lee, Yong Sun Ko, In Seak Hwang
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Title:
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METHOD FOR CLEANING DAMAGED LAYERS AND POLYMER RESIDUE FROM SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG, PALDAL-GU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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| THE LAW OFFICES OF EUGENE M. LEE PLLC |
| EUGENE M. LEE |
| 2111 WILSON BOULEVARD, SUITE 1200 |
| ARLINGTON, VA 22201 |
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