Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/12/2004
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Application #:
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10256368
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Inventors:
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Pei-Yuan Gao, Lu You, Richard Huang
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Title:
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METHOD FOR FORMING A HARDMASK EMPLOYING MULTIPLE INDEPENDENTLY FORMED LAYERS OF A PECVD MATERIAL TO REDUCE PINHOLES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1160 KERN AVENUE |
| SUNNYVALE, CALIFORNIA 94086-3453 |
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| FOLEY & LARDNER |
| DAVID A. BLUMENTHAL |
| 2029 CENTURY PARK EAST |
| SUITE 3500 |
| LOS ANGELES, CA 90067-3021 |
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