Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10101540
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Filing Dt:
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03/18/2002
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Publication #:
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Pub Dt:
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09/18/2003
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Inventors:
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Timothy Weidman, Nikolaos Bekiaris, Phong H. Nguyen, Josephine Chang
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Title:
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METHOD OF FORMING A DUAL DAMASCENE STRUCTURE USING AN AMORPHOUS SILICON HARD MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| A CORPORATION OF THE STATE OF DELAWARE |
| 3050 BOWERS AVE. M/S 2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PATENT COUNSEL, M/S 2061 |
| PO BOX 450-A |
| SANTA CLARA, CA 95052 |
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