Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10455129
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Filing Dt:
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06/05/2003
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Publication #:
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Pub Dt:
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12/11/2003
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Inventor:
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Stephen Beaudoin
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Title:
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ABRASIVE PARTICLES TO CLEAN SEMICONDUCTOR WAFERS DURING CHEMICAL MECHANICAL PLANARIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 873511 |
| TEMPE, ARIZONA 85287 |
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| QUARLES & BRADY STREICH LANG LLP |
| ROBERT D. ATKINS |
| TWO NORTH CENTRAL AVE. |
| ONE RENAISSANCE SQUARE |
| PHOENIX, AZ 85004-2391 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| BOX 879209 |
| TEMPE, ARIZONA 85287 |
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| NATIONAL SCIENCE FOUNDATION |
| 4201 WILSON BLVD. |
| ROOM 1265 |
| ARLINGTON, VA 22230 |
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Assignment:
3
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 4201 WILSON BLVD. |
| RM 1265 |
| ARLINGTON, VIRGINIA 22230 |
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| ROBIN C. FRITSCH |
| 4201 WILSON BLVD. |
| RM 1265 |
| ARLINGTON, VA 22230 |
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