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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
6815362
Issue Dt:
11/09/2004
Application #:
10138980
Filing Dt:
05/03/2002
Inventors:
Vincent Wong, Brett C. Richardson, Andrew Lui, Scott Baldwin
Title:
ENDPOINT DETERMINATION OF PROCESS RESIDUES IN WAFER-LESS AUTO CLEAN PROCESS USING OPTICAL EMISSION SPECTROSCOPY
Assignment: 1
Reel/Frame:
012874/0973Recorded: 05/03/2002Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WONG, VINCENT
Exec Dt:
05/03/2002
RICHARDSON, BRETT C.
Exec Dt:
05/03/2002
LUI, ANDREW
Exec Dt:
05/03/2002
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
MARTINE & PENNILLA, LLP
MICHAEL L. GENCARELLA
710 LAKEWAY DRIVE, SUITE 170
SUNNYVALE, CA 94085
Assignment: 2
Reel/Frame:
013272/0261Recorded: 09/09/2002Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WONG, VINCENT
Exec Dt:
05/03/2002
RICHARDSON, BRETT C.
Exec Dt:
05/03/2002
LUI, ANDREW
Exec Dt:
05/03/2002
BALDWIN, SCOTT
Exec Dt:
05/15/2002
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
MARTINE & PENILLA, LLP
MICHAEL L. GENCARELLA
710 LAKEWAY DRIVE, SUITE 170
SUNNYVALE, CA 94085

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