Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10653315
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Filing Dt:
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09/02/2003
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Inventors:
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Yuan-Hsun Chang, Ming-Hsien Chang, Chung-Ping Lin, Tzu-Hao Liu
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Title:
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METHODOLOGY OF ROTATIONAL ETCHING TOOL MAINTENANCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 16, LI-HSIN RD. |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C. |
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| THOMAS, KAYDEN, HORSTEMEYER & RISLEY LLP |
| DANIEL R. MCCLURE |
| 100 GALLERIA PARKWAY |
| STE. 1750 |
| ATLANTA, GA 30339-5948 |
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