Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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10072102
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Filing Dt:
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02/08/2002
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Publication #:
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Pub Dt:
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08/14/2003
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Inventors:
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Chew-Hoe Ang, Eng Hua Lim, Randall Cha, Jia-Zhen Zheng, Elgin Quek, Mei-Sheng Zhou et al
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Title:
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METHOD TO PATTERN SMALL FEATURES BY USING A RE-FLOWABLE HARD MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| STREET 2 |
| 60 WOODLANDS INDUSTRIA PARK D |
| SINGAPORE 738406, SINGAPORE |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NEW YORK 12603 |
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