Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/07/2004
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Application #:
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09315988
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Filing Dt:
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05/21/1999
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Inventors:
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HAJIME KAWANO, MINORU WAKITA, MASATO KAMADA, HARUO YODA
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Title:
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ELECTRON BEAM LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
TOKYO 101, JAPAN |
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KENYON & KENYON |
JOHN C. ALTMILLER |
1500 K STREET, N.W., SUITE 700 |
WASHINGTON, DC 20005 |
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