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Patent Assignment Abstract of Title
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Total Assignments: 6
Patent #:
6830650
Issue Dt:
12/14/2004
Application #:
10194526
Filing Dt:
07/12/2002
Publication #:
20040007326
Pub Dt:
01/15/2004
Inventors:
Gregory A. Roche, Leonard J. Mahoney, Daniel C. Carter, Steven J. Roberts
Title:
WAFER PROBE FOR MEASURING PLASMA AND SURFACE CHARACTERISTICS IN PLASMA PROCESSING ENVIROMENTS
Assignment: 1
Reel/Frame:
013102/0550Recorded: 07/12/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ROCHE, GREGORY A.
Exec Dt:
07/10/2002
MAHONEY, LEONARD J.
Exec Dt:
07/10/2002
CARTER, DANIEL C.
Exec Dt:
07/10/2002
ROBERTS, STEVEN J.
Exec Dt:
07/10/2002
Assignee:
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DR.
FORT COLLINS, COLORADO 80525
Correspondent:
ADVANCED ENERGY INDUSTRIES
BENJAMIN HUDSON, JR.
1625 SHARP POINT DR.
FORT COLLINS, CO 80525
Assignment: 2
Reel/Frame:
017089/0881Recorded: 01/31/2006Pages: 12
Conveyance:
SECURITY AGREEMENT
Assignor:
ADVANCED ENERGY INDUSTRIES, INC.
Exec Dt:
12/09/2005
Assignee:
ADVANCED PLASMA, INC.
3964 RIVERMARK PLAZA #207
SANTA CLARA, CALIFORNIA 95054
Correspondent:
JOSEPH R. TIANO
P.O. BOX 190187
SAN FRANCISCO, CA 94119-0187
Assignment: 3
Reel/Frame:
017251/0365Recorded: 02/10/2006Pages: 16
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE RECORDAL OF THE SECURITY AGREEMENT PREVIOUSLY RECORDED ON REEL 017089 FRAME 0881.
Assignor:
ADVANCED PLASMA, INC.
Exec Dt:
12/09/2005
Assignee:
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE
FORT COLLINS, COLORADO 80525
Correspondent:
JOSEPH R. TIANO
THELEN REID & PRIEST LLP
701 EIGHTH STREET, N.W.
WASHINGTON, DC 20001-3721
Assignment: 4
Reel/Frame:
017366/0240Recorded: 03/27/2006Pages: 12
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
AVANCED PLASMA, INC.
Exec Dt:
03/01/2006
Assignee:
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE
FORT COLLINS, COLORADO 80525
Correspondent:
JOSEPH R. TIANO, JR.
701 EIGHTH STREET, N.W.
WASHINGTON, DC 20001
Assignment: 5
Reel/Frame:
018654/0653Recorded: 12/04/2006Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
ADVANCED ENERGY INDUSTRIES, INC.
Exec Dt:
06/09/2006
Assignee:
ONWAFER TECHNOLOGIES, INC.
5627 GIBRALTAR DRIVE, STE 200
PLEASANTON, CALIFORNIA 94588
Correspondent:
LARRY WILLIAMS
3645 MONTGOMERY DR.
SANTA ROSA, CA 95405-5212
Assignment: 6
Reel/Frame:
020417/0596Recorded: 01/28/2008Pages: 7
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
ONWAFER TECHNOLOGIES INC.
Exec Dt:
01/16/2007
Assignee:
KLA-TENCOR CORPORATION
160 RIO ROBLES
SAN JOSE, CALIFORNIA 95134
Correspondent:
JOSHUA D. ISENBERG
809 CORPORATE WAY
FREMONT, CA 94539

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