Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/21/2004
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Application #:
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10218855
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Filing Dt:
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08/13/2002
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Publication #:
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Pub Dt:
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02/20/2003
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Inventor:
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Michio Kohno
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Title:
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ILLUMINATION APPARATUS, PROJECTION EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| MORGAN & FINNEGAN, LLP |
| MATTHEW K. BLACKBURN |
| 345 PARK AVE. |
| NEW YORK, NY 10154-0053 |
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