Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/28/2004
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Application #:
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10090761
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Filing Dt:
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03/06/2002
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Publication #:
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Pub Dt:
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09/11/2003
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Inventors:
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Nobuyuki Mise, Ken Yoshioka, Ryoji Nishio, Tatehito Usui
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Title:
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ETCHING METHOD OF HARDLY-ETCHED MATERIAL AND SEMICONDUCTOR FABRICATING METHOD AND APPARATUS USING THE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| MELVIN KRAUS |
| 1300 N. SEVENTEENTH ST. |
| STE. 1800 |
| ARLINGTON, VA 22209 |
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