Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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09676548
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Filing Dt:
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09/29/2000
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Inventor:
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Grant Kenji Larsen
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Title:
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SURFACE STRUCTURE AND METHOD OF MAKING, AND ELECTROSTATIC WAFER CLAMP INCORPORATING SURFACE STRUCTURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIPMENT |
| GARY L. LOSER, ESQ |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930 |
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