Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/11/2005
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Application #:
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10099029
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Filing Dt:
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03/15/2002
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Inventors:
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Same-Ting Chen, Cheng-Shien Lee, Chin-Wang Hu, Chieh-Yuan Cheng, Hsiang-Chien Hsu et al
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Title:
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CLEANING PROCESS FOR PHASE SHIFT MASKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
121 PARK AVE. 3 |
HSIN-CHU, TAIWAN R.O.C |
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GEORGE O. SAILE |
20 MCINTOSH DRIVE |
POUGHKEEPSIE, NY 12603 |
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