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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
6843881
Issue Dt:
01/18/2005
Application #:
10115526
Filing Dt:
04/02/2002
Publication #:
20030185966
Pub Dt:
10/02/2003
Inventors:
Bok Hoen Kim, Nam Le, Martin Seamons, Ameeta Madhava, Moshe Sarfaty, Michael P. Nault et al
Title:
DETECTING CHEMILUMINESCENT RADIATION IN THE CLEANING OF A SUBSTRATE PROCESSING CHAMBER
Assignment: 1
Reel/Frame:
012774/0503Recorded: 04/02/2002Pages: 22
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KIM, BOK HOEN
Exec Dt:
03/04/2002
SEAMONS, MARTIN
Exec Dt:
03/06/2002
MADHAVA, AMEETA
Exec Dt:
03/08/2002
NAULT, MICHAEL P.
Exec Dt:
03/06/2002
NOWAK, THOMAS
Exec Dt:
03/05/2002
TANAKA, TSUTOMU
Exec Dt:
03/25/2002
SARFATY, MOSHE
Exec Dt:
03/10/2002
Assignee:
APPLIED MATERIALS, INC.
M/S 2061
3050 BOWERS AVE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
ROBET W. MULCAHY
PATENT COUNSEL, M/S 2061
P.O. BOX 450-A
SANTA CLARA, CA 95052
Assignment: 2
Reel/Frame:
012970/0608Recorded: 08/09/2002Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
LE, NAM
Exec Dt:
08/07/2002
Assignee:
APPLIED MATERIALS, INC.
PATENT DEPARTMENT
P.O. BOX 450A, M/S #2061
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
PETER J. SGARBOSSA
P.O. BOX 450A
M/S 2061, PATENT DEPT.
SANTA CLARA, CA 95052

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