Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/01/2005
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Application #:
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10128899
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Filing Dt:
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04/22/2002
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Inventors:
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Krishnan Shrinivasan, Adrianne Tipton
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Title:
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METHOD AND APPARATUS FOR REMOVING PHOTORESIST AND POST-ETCH RESIDUE FROM SEMICONDUCTOR SUBSTRATES BY IN-SITU GENERATION OF OXIDIZING SPECIES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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DELIO & PETERSON, LLC |
ROBERT CURCIO |
121 WHITNEY AVENUE |
NEW HAVEN, CT 06510-1241 |
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