Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/01/2005
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Application #:
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10067520
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Filing Dt:
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02/05/2002
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Inventors:
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Krishnan Shrinivasan, Souvik Banerjee, Francisco Juarez, Karen A. Reinhardt et al
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Title:
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APPARATUS AND METHODS FOR PROCESSING SEMICONDUCTOR SUBSTRATES USING SUPERCRITICAL FLUIDS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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BEYER WEAVER & THOMAS, LLP |
BRIAN D. GRIEDEL |
P.O. BOX 778 |
BERKELEY, CA 94704-0778 |
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