Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10732161
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Filing Dt:
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12/10/2003
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Inventors:
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Brian Matthews, James R. Willis, Paul E. Lustiber
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Title:
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WAFER TEMPERATURE TRAJECTORY CONTROL METHOD FOR HIGH TEMPERATURE RAMP RATE APPLICATIONS USING DYNAMIC PREDICTIVE THERMAL MODELING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915-1053 |
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| ESCHWEILER & ASSOCIATES, LLC |
| THOMAS G. ESCHWEILER |
| 629 EUCLID AVENUE, SUITE 1210 |
| CLEVELAND, OH 44114 |
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Assignment:
2
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| 3003 TASMAN DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHRISTOPHER E. KONDRACKI |
| 2001 JEFFERSON DAVIS, HWY., SUITE 1007 |
| ARLINGTON, VA 22202 |
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