Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10104330
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Filing Dt:
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03/22/2002
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Publication #:
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Pub Dt:
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11/21/2002
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Inventor:
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Chi-Feng Cheng
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Title:
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SYSTEM FOR MONITORING OXIDANT CONCENTRATION OF SLURRY IN A CHEMICAL MECHANICAL POLISHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK, |
| NO. 16, LI-HSIN RD., |
| HSINCHU,, TAIWAN R.O.C |
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| J.C. PATENTS, INC. |
| 4 VENTURE, SUITE 250 |
| IRVINE, CA 92618 |
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