Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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10286813
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Filing Dt:
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11/04/2002
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Publication #:
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Pub Dt:
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05/15/2003
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Inventor:
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Mitsuya Sato
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Title:
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LIGHT SOURCE, LIGHT SOURCE GENERATION CONTROL METHOD, EXPOSURE APPARATUS AND MAINTENANCE METHOD THEREFOR, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR PRODUCTION FACILITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| STEVEN E. WARNER |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NY 10112-3801 |
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