Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10159794
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Filing Dt:
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05/30/2002
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Publication #:
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Pub Dt:
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02/20/2003
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Inventors:
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Shamouil Shamouilian, Canfeng Lai, Michael Santiago Cox, Padmanabhan Krishnaraj et al
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Title:
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SEMICONDUCTOR DEVICE FABRICATION CHAMBER CLEANING METHOD AND APPARATUS WITH RECIRCULATION OF CLEANING GAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT DEPARTMENT |
| P.O. BOX 450A, M/S #2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| JAMES C. WILSON |
| P.O. BOX 450A, M/S 2061 |
| PATENT DEPT. |
| SANTA CLARA, CA 95052 |
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