Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10142498
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Filing Dt:
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05/10/2002
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Publication #:
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Pub Dt:
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01/30/2003
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Inventor:
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Kenichiro Shinoda
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Title:
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ILLUMINATION APPARATUS, EXPOSURE APPARATUS USING THE SAME AND DEVICE FABRICATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| MORGAN & FINNEGAN, LLP |
| JOSEPH A. CALVARUSO |
| 345 PARK AVENUE |
| NEW YORK, NY 10154-0053 |
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