Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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09811447
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Filing Dt:
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03/20/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Inventor:
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Shuichi Yabu
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Title:
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EXPOSURE APPARATUS, GAS REPLACING METHOD, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| STEPHEN E. BELISLE |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NY 10112-3801 |
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