Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/12/2005
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Application #:
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09854092
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Filing Dt:
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05/10/2001
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Publication #:
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Pub Dt:
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06/06/2002
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Inventors:
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Tony P. Chiang, Karl F. Leeser
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Title:
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METHOD AND APPARATUS FOR IMPROVED TEMPERATURE CONTROL IN ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 71 BONAVENTURA DRIVE |
| SAN JOSE, CALIFORNIA 95134 |
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| CARR & FERRELL, LLP |
| BRADLEY W. SCHEER |
| 2225 EAST BAYSHORE ROAD, SUITE 200 |
| PALO ALTO, CA 94303 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| PATENT LAW GROUP LLP |
| BRIAN D. OGONOWSKY |
| 2635 NORTH FIRST STREET |
| SUITE 223 |
| SAN JOSE, CA 95134 |
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