Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10026419
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Filing Dt:
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12/26/2001
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Publication #:
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Pub Dt:
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09/05/2002
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Inventors:
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Kenji Kawano, Shinichi Ito, Eishi Shiobara, Daisuke Kawamura, Kei Hayasaki
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Title:
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APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF PROCESSING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 1-1 SHIBAURA 1-CHOME |
| TOKYO, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, ETAL |
| MR ERNEST F. CHAPMAN |
| 1300 I STREET NW |
| WASHINGTON, D.C. 20005-3315 |
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