Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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09633857
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Filing Dt:
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08/07/2000
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Inventors:
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David C. Ahlgren, Jack O. Chu, Basanth Jagannathan, Ryan W. Wuthrich
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Title:
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IN-SITU MONITORING AND CONTROL OF GERMANIUM PROFILE IN SILICON-GERMANIUM ALLOY FILMS AND TEMPERATURE MONITORING DURING DEPOSITION OF SILICON FILMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NEW ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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RESTON INTERNATIONAL CENTER |
MCGUIRE WOODS LLP |
JOSEPH P. ABATE |
11800 SUNRISE VALLEY DRIVE, SUITE 900 |
RESTON, VA 20191 |
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