Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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09809663
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Filing Dt:
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03/15/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Inventors:
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Mukesh V. Khare, Christopher P. D'Emic, Thomas T. Hwang, Paul C. Jamison, Beth A. Ward et al
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Title:
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METHOD FOR IMPROVED PLASMA NITRIDATION OF ULTRA THIN GATE DIELECTRICS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORPORATION |
| MARGARET A. PEPPER, ESQ. |
| 2070 ROUTE 52, ZIP 482 |
| INTELLECTUAL PROPERTY LAW |
| HOPEWELL JUNCTION, NY 12533 |
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