Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10770476
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Filing Dt:
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02/04/2004
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Publication #:
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Pub Dt:
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08/12/2004
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Inventor:
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Stephen Roux
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Title:
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SYSTEM FOR RECYCLING GASES USED IN A LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| STERNE KESSLER GOLDSTEIN, ET AL. |
| JASON D. EISENBERG |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005-3934 |
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