Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10247812
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Filing Dt:
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09/18/2002
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Publication #:
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Pub Dt:
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03/18/2004
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Inventor:
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Robert J. Steger
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Title:
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METHOD AND APPARATUS FOR THE COMPENSATION OF EDGE RING WEAR IN A PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| LAM RESEARCH CORPORATION |
| MICHAEL S. BRANDT |
| 4650 CUSHING PARKWAY, CA-1 |
| FREMONT, CA 94538 |
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