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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
05/24/2005
Application #:
10778411
Filing Dt:
02/13/2004
Publication #:
Pub Dt:
08/19/2004
Inventors:
Christopher A. Bode, Alexander J. Pasadyn
Title:
METHOD AND APPARATUS FOR CONTROLLING PHOTOLITHOGRAPHY OVERLAY REGISTRATION INCORPORATING FEEDFORWARD OVERLAY INFORMATION
Assignment: 1
Reel/Frame:
048844/0693Recorded: 04/10/2019Pages: 9
Conveyance:
SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/15/2019
Assignee:
121 W. LONG LAKE ROAD
SUITE 300
BLOOMFIELD HILLS, MICHIGAN 48304
Correspondent:
CHRISTOPHER J. RECKAMP
311 S. WACKER DRIVE
FAEGRE BAKER DANIELS LLP
CHICAGO, IL 60606
Assignment: 2
Reel/Frame:
055766/0694Recorded: 03/30/2021Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/28/2019
Assignee:
121 W. LONG LAKE ROAD
BLOOMFIELD HILLS, MICHIGAN 48304
Correspondent:
FENG XU
1526 GILPIN AVENUE
WILMINGTON, DE 19806

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