Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10172243
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Filing Dt:
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06/14/2002
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Publication #:
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Pub Dt:
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12/25/2003
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Inventors:
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Terry Leung, Qiqun Zheng, Chang-Lin Hsieh, Yan Ye, Takehiko Komatsu
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Title:
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SELECTIVE ETCHING OF LOW-K DIELECTRICS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| A CORPORATION OF DELAWARE |
| 3050 BOWERS AVENUE, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A, M/S 2061 |
| PATENT COUNSEL |
| SANTA CLARA, CA 95052 |
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