Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10180295
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Filing Dt:
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06/27/2002
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Publication #:
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Pub Dt:
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01/23/2003
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Inventors:
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Yoshinori Fujiwara, Yasuhiko Kenjo, Yoshihiko Watanabe
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Title:
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WORKPIECE STAGE OF A RESIST CURING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 19TH FLOOR, ASAHITOKAI BUILDING, 6-1, OHTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100 |
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| NIXON PEABODY LLP |
| DAVID S. SAFRAN |
| 8180 GREENSBORO DRIVE |
| SUITE 800 |
| MCLEAN VA 22102 |
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