Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/14/2005
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Application #:
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10016562
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Filing Dt:
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12/12/2001
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Publication #:
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Pub Dt:
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06/12/2003
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Inventors:
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Chang-Lin Hsieh, Jie Yuan, Hui Chen, Theodoros Panagopoulos, Yan Ye
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Title:
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PROCESS FOR SELECTIVELY ETCHING DIELECTRIC LAYERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE. |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT MULCAHY |
| P.O. BOX 450A, M/S 2061 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CA 95052 |
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