Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/21/2005
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Application #:
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10313663
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Filing Dt:
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12/06/2002
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Publication #:
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Pub Dt:
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06/10/2004
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Inventor:
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Noriyuki Hirayanagai
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Title:
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RETICLE CHAMBERS AND RETICLE CASSETTES PROVIDING TEMPERATURE CONTROL AND READY EXCHANGE OF RETICLES FOR EXPOSURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BLDG., 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| INTELLECTUAL PROPERTY HEADQUARTERS |
| TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN, LLP |
| DONALD L. STEPHENS, JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OREGON 97204-2988 |
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