Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10366206
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Filing Dt:
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02/13/2003
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Publication #:
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Pub Dt:
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08/19/2004
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Inventors:
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Ching-Hui Ma, Chao-Cheng Chen, Tsang-Jiuh Wu, Hui-Chang Yu, Hun-Jan Tao
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Title:
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IN-SITU DISCHARGE TO AVOID ARCING DURING PLASMA ETCH PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 121 PARK AVE. 3 |
| SCIENCE -BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C. |
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| GEORGE O. SAILE |
| 28 DAVIS AVENUE |
| POUGHKEEPSIE, NY 12603 |
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