Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/12/2005
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Application #:
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10411520
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Filing Dt:
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04/09/2003
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Inventors:
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Eric A. Hudson, James V. Tietz
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Title:
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METHOD FOR PLASMA ETCHING USING PERIODIC MODULATION OF GAS CHEMISTRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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BEYER WEAVER & THOMAS LLP |
P.O. BOX 778 |
BERKELEY, CA 94704-0778 |
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