Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/19/2005
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Application #:
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10671841
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Filing Dt:
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09/25/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Inventors:
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Dave Marquardt, Sooyun Joh, David Cohen, Edward J. McInerney
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Title:
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UNIFORM FLUID DISTRIBUTION AND EXHAUST SYSTEM FOR A CHEMICAL-MECHANICAL PLANARIZATION DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 N. FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| INGRASSIA FISHER & LORENZ, P.C. |
| DAVID K. BENSON |
| 7150 E. CAMELBACK RD., STE. 325 |
| SCOTTSDALE, AZ 85251 |
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