Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/19/2005
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Application #:
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10780670
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Filing Dt:
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02/19/2004
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Publication #:
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Pub Dt:
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02/03/2005
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Inventors:
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Hideyuki Kazumi, Tsuyoshi Yoshida, Eiji Ikegami, Kouichi Nakaune, Masamichi Sakaguchi et al
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Title:
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LSI DEVICE ETCHING METHOD AND APPARATUS THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-24-14, NISHI-SHIMBASHI |
| MINATO-KU, TOKYO, JAPAN |
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| CROWELL & MORING LLP |
| JAMES F. MCKEOWN |
| INTELLECTUAL PROPERTY GROUP |
| P.O. BOX 14300 |
| WASHINGTON, DC 20044-4300 |
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