Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/26/2005
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Application #:
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10403179
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Filing Dt:
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03/28/2003
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Publication #:
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Pub Dt:
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04/15/2004
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Inventors:
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Akira Shimizu, Hideaki Fukuda, Baiei Kawano, Kazuo Sato
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Title:
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Method of film deposition using single-wafer-processing type CVD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6-CHOME, NAGAYAMA |
| TAMA-SHI, TOKYO, 206-0025, JAPAN |
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| KNOBBE MARTENS OLSON & BEAR LLP |
| 2040 MAIN STREET |
| FOURTEENTH FLOOR |
| IRVINE, CA 92614 |
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